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Abstract #2961

Micro-MR Coil Construction by Combining Metal-On-Glass Inkjetting and MEMS Techniques

Dario Mager1, Vlad Badilita1, Ute Loeffelman1, Patrick James Smith1, Jan Gerrit Korvink1

1Dept. of Microsystems Engineering IMTEK, University of Freiburg, Freiburg, Germany


This paper presents the inkjet printing of coils directly onto a

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